Issued Patents All Time
Showing 1–12 of 12 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12165894 | Processing method, method of manufacturing semiconductor, and substrate processing apparatus | Naofumi Ohashi, Tadashi Takasaki, Shun MATSUI | 2024-12-10 |
| 11749550 | Method of manufacturing semiconductor device by setting process chamber maintenance enable state | Naofumi Ohashi, Tadashi Takasaki, Shun MATSUI | 2023-09-05 |
| 11422528 | Substrate processing system, method of manufacturing semiconductor device, and recording medium | Shun MATSUI, Tadashi Takasaki, Naofumi Ohashi | 2022-08-23 |
| 11355372 | Method of manufacturing semiconductor device by setting process chamber to maintenance enable state | Naofumi Ohashi, Tadashi Takasaki, Shun MATSUI | 2022-06-07 |
| 11342212 | Method of manufacturing semiconductor device by setting process chamber maintenance enable state | Naofumi Ohashi, Tadashi Takasaki, Shun MATSUI | 2022-05-24 |
| 10984991 | Substrate processing apparatus | Shun MATSUI | 2021-04-20 |
| 10930533 | Substrate processing apparatus, substrate processing system and method of manufacturing semiconductor device | Naofumi Ohashi, Tadashi Takasaki, Shun MATSUI | 2021-02-23 |
| 10651068 | Method of manufacturing semiconductor device by setting process chamber to maintenance enable state | Naofumi Ohashi, Tadashi Takasaki, Shun MATSUI | 2020-05-12 |
| 10290516 | Substrate processing apparatus, maintenance method, and maintenance program | Akihiko Yoneda, Hiroshi Kotani | 2019-05-14 |
| 10134587 | Method of manufacturing semiconductor device | — | 2018-11-20 |
| 9875920 | Substrate processing apparatus | — | 2018-01-23 |
| 9244447 | Substrate processing apparatus, substrate processing method, non-transitory computer-readable recording medium, and substrate transfer method | — | 2016-01-26 |