Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12428729 | Substrate processing apparatus, method of manufacturing semiconductor device, and non-transitory computer-readable recording medium storing program | — | 2025-09-30 |
| 11060190 | Substrate processing apparatus and control system | Hiroki OKAMIYA | 2021-07-13 |
| 9690879 | Substrate processing apparatus, method of manufacturing semiconductor device, and method of generating recipe | Hiroyuki Mitsui, Susumu NISHIURA, Hiroshi Ekko, Kaori Inoshima, Osamu Morita | 2017-06-27 |