Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10131992 | Substrate processing apparatus, method of controlling substrate processing apparatus, method of maintaining substrate processing apparatus, and recording medium | Susumu NISHIURA, Kaori Inoshima, Hiroyuki Mitsui | 2018-11-20 |
| 9690879 | Substrate processing apparatus, method of manufacturing semiconductor device, and method of generating recipe | Hiroyuki Mitsui, Susumu NISHIURA, Kaori Inoshima, Kazuo NAKAYA, Osamu Morita | 2017-06-27 |
| 8806370 | Substrate processing apparatus | Shigeki Nogami, Mitsuru Funakura, Isao Teranishi, Tsukasa Yashima | 2014-08-12 |