Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9960065 | Substrate processing apparatus for managing transfer state of substrate gas storage container based on supply flow rate | Junichi KAWASAKI | 2018-05-01 |
| 8806370 | Substrate processing apparatus | Shigeki Nogami, Isao Teranishi, Tsukasa Yashima, Hiroshi Ekko | 2014-08-12 |