Issued Patents All Time
Showing 1–19 of 19 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11966210 | Substrate processing apparatus, device management controller, and recording medium | Kazuhide Asai, Kazuyoshi Yamamoto, Hidemoto Hayashihara, Takayuki KAWAGISHI, Kayoko Yashiki +4 more | 2024-04-23 |
| 11782425 | Substrate processing apparatus, method of monitoring abnormality of substrate processing apparatus, and recording medium | Kazuyoshi Yamamoto, Kazuhide Asai, Hidemoto Hayashihara, Mitsuru Fukuda, Kayoko Yashiki +1 more | 2023-10-10 |
| 11237538 | Substrate processing apparatus, device management controller, and recording medium | Kazuhide Asai, Kazuyoshi Yamamoto, Hidemoto Hayashihara, Takayuki KAWAGISHI, Kayoko Yashiki +4 more | 2022-02-01 |
| 11086304 | Substrate processing in a process chamber for semiconductor manufacturing and apparatus management controller with error analysis | Kazuhide Asai, Kazuyoshi Yamamoto, Takayuki KAWAGISHI, Hidemoto Hayashihara, Kayoko Yashiki | 2021-08-10 |
| 11052790 | Vehicle seat structure | Takashi Suzuki, Koji NONOWAKI, Shin Sakai, Shigeru Kobayashi | 2021-07-06 |
| 10937676 | Substrate processing apparatus and device management controller | Kazuhide Asai, Hidemoto Hayashihara, Kazuyoshi Yamamoto, Takayuki KAWAGISHI, Kayoko Yashiki | 2021-03-02 |
| 10860005 | Substrate processing apparatus and non-transitory computer-readable recording medium | Kazuhide Asai, Hidemoto Hayashihara, Mitsuru Fukuda, Kazuyoshi Yamamoto, Kayoko Yashiki +1 more | 2020-12-08 |
| 10452856 | Processing apparatus, controller and processing system | Ichiro NUNOMURA, Satoru Takahata | 2019-10-22 |
| 9720407 | Substrate processing system, substrate processing apparatus and method for accumulating data for substrate processing apparatus | Yoshitaka Koyama | 2017-08-01 |
| 9400794 | Group management apparatus, substrate processing system and method of managing files of substrate processing apparatus | Kazuhide Asai, Osamu Ueda | 2016-07-26 |
| 9104196 | Substrate processing system and group managing apparatus | Yoshitaka Koyama, Yasuhiro Joho | 2015-08-11 |
| 8719230 | Information managing method, information searching method and data displaying method | Kazuhide Asai, Toshiro Koshimaki, Kayoko Yashiki | 2014-05-06 |
| 8560107 | Substrate processing system | Osamu Ueda | 2013-10-15 |
| 8538571 | Substrate processing system, group managing apparatus, and method of analyzing abnormal state | Kazuhide Asai, Kazuyoshi Yamamoto | 2013-09-17 |
| 8447424 | Substrate processing system and group management system | Kazuhide Asai | 2013-05-21 |
| 8438655 | Substrate processing system | — | 2013-05-07 |
| 8329479 | Information managing method, information managing apparatus and substrate processing system | Kazuhide Asai, Toshiro Koshimaki, Kayoko Yashiki | 2012-12-11 |
| 7813828 | Substrate processing system and group management system | Kazuhide Asai | 2010-10-12 |
| 7509521 | Memory dump generation with quick reboot | Takeshi Misu | 2009-03-24 |