Issued Patents All Time
Showing 1–13 of 13 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12417049 | Management apparatus, method of processing data, recording medium, method of manufacturing semiconductor device, and processing system | Yusuke Sakamoto, Kazuhide Asai, Osamu Ueda, Shuai Yuan | 2025-09-16 |
| 11996337 | Substrate processing apparatus, method of manufacturing semiconductor device, and recording medium | Kazuyoshi Yamamoto, Hidemoto Hayashihara, Kazuhide Asai | 2024-05-28 |
| 11966210 | Substrate processing apparatus, device management controller, and recording medium | Kazuhide Asai, Kazuyoshi Yamamoto, Hidemoto Hayashihara, Takayuki KAWAGISHI, Yukio Miyata +4 more | 2024-04-23 |
| 11782425 | Substrate processing apparatus, method of monitoring abnormality of substrate processing apparatus, and recording medium | Kazuyoshi Yamamoto, Kazuhide Asai, Hidemoto Hayashihara, Mitsuru Fukuda, Takayuki KAWAGISHI +1 more | 2023-10-10 |
| 11387152 | Substrate processing apparatus, method of manufacturing semiconductor device, and recording medium | Kazuyoshi Yamamoto, Hidemoto Hayashihara, Kazuhide Asai | 2022-07-12 |
| 11237538 | Substrate processing apparatus, device management controller, and recording medium | Kazuhide Asai, Kazuyoshi Yamamoto, Hidemoto Hayashihara, Takayuki KAWAGISHI, Yukio Miyata +4 more | 2022-02-01 |
| 11086304 | Substrate processing in a process chamber for semiconductor manufacturing and apparatus management controller with error analysis | Kazuhide Asai, Kazuyoshi Yamamoto, Takayuki KAWAGISHI, Hidemoto Hayashihara, Hiroyuki Iwakura | 2021-08-10 |
| 10937676 | Substrate processing apparatus and device management controller | Kazuhide Asai, Hidemoto Hayashihara, Kazuyoshi Yamamoto, Takayuki KAWAGISHI, Hiroyuki Iwakura | 2021-03-02 |
| 10860005 | Substrate processing apparatus and non-transitory computer-readable recording medium | Kazuhide Asai, Hiroyuki Iwakura, Hidemoto Hayashihara, Mitsuru Fukuda, Kazuyoshi Yamamoto +1 more | 2020-12-08 |
| 10289781 | Management apparatus, substrate processing system and non-transitory computer-readable recording medium | Toshiro Koshimaki, Kazuhide Asai, Hideto Shimizu, Kazuyoshi Yamamoto, Nobuhisa Makino | 2019-05-14 |
| 9581996 | Apparatus, method, and computer-readable medium for managing abnormality data measured in the substrate manufacturing process | Kazuhide Asai, Hideto Shimizu | 2017-02-28 |
| 8719230 | Information managing method, information searching method and data displaying method | Kazuhide Asai, Hiroyuki Iwakura, Toshiro Koshimaki | 2014-05-06 |
| 8329479 | Information managing method, information managing apparatus and substrate processing system | Kazuhide Asai, Hiroyuki Iwakura, Toshiro Koshimaki | 2012-12-11 |