Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11996337 | Substrate processing apparatus, method of manufacturing semiconductor device, and recording medium | Kazuyoshi Yamamoto, Kayoko Yashiki, Kazuhide Asai | 2024-05-28 |
| 11966210 | Substrate processing apparatus, device management controller, and recording medium | Kazuhide Asai, Kazuyoshi Yamamoto, Takayuki KAWAGISHI, Kayoko Yashiki, Yukio Miyata +4 more | 2024-04-23 |
| 11782425 | Substrate processing apparatus, method of monitoring abnormality of substrate processing apparatus, and recording medium | Kazuyoshi Yamamoto, Kazuhide Asai, Mitsuru Fukuda, Kayoko Yashiki, Takayuki KAWAGISHI +1 more | 2023-10-10 |
| 11387152 | Substrate processing apparatus, method of manufacturing semiconductor device, and recording medium | Kazuyoshi Yamamoto, Kayoko Yashiki, Kazuhide Asai | 2022-07-12 |
| 11237538 | Substrate processing apparatus, device management controller, and recording medium | Kazuhide Asai, Kazuyoshi Yamamoto, Takayuki KAWAGISHI, Kayoko Yashiki, Yukio Miyata +4 more | 2022-02-01 |
| 11086304 | Substrate processing in a process chamber for semiconductor manufacturing and apparatus management controller with error analysis | Kazuhide Asai, Kazuyoshi Yamamoto, Takayuki KAWAGISHI, Kayoko Yashiki, Hiroyuki Iwakura | 2021-08-10 |
| 10937676 | Substrate processing apparatus and device management controller | Kazuhide Asai, Kazuyoshi Yamamoto, Takayuki KAWAGISHI, Kayoko Yashiki, Hiroyuki Iwakura | 2021-03-02 |
| 10860005 | Substrate processing apparatus and non-transitory computer-readable recording medium | Kazuhide Asai, Hiroyuki Iwakura, Mitsuru Fukuda, Kazuyoshi Yamamoto, Kayoko Yashiki +1 more | 2020-12-08 |