Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12080149 | Processing apparatus, display method, method of manufacturing semiconductor device and non-transitory computer-readable recording medium | Masanori OKUNO, Junichi KAWASAKI, Shinichiro Mori, Satomi YAMAZAKI | 2024-09-03 |
| 10535543 | Teaching jig, substrate processing apparatus, and teaching method | Akihito Watanabe, Ryo Yamaguchi, Katsumi Takashima | 2020-01-14 |
| 9104196 | Substrate processing system and group managing apparatus | Yoshitaka Koyama, Hiroyuki Iwakura | 2015-08-11 |
| 8266095 | Substrate processing system and operation inspecting method | Hideto Yamaguchi, Mitsuhiro Matsuda, Yoshitaka Koyama | 2012-09-11 |
| 7930049 | Control method for a substrate processing apparatus | — | 2011-04-19 |