Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10535543 | Teaching jig, substrate processing apparatus, and teaching method | Akihito Watanabe, Ryo Yamaguchi, Yasuhiro Joho | 2020-01-14 |
| 10340164 | Substrate processing apparatus, method of measuring temperature of substrate processing apparatus and non-transitory computer-readable recording medium | Akihito Watanabe, Naoya Miyashita, Shigeru Honda | 2019-07-02 |