Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10910214 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Yoshitomo HASHIMOTO, Masanori NAKAYAMA, Masaya NAGATO, Tatsuru Matsuoka, Hiroki Tamashita +1 more | 2021-02-02 |
| 10763101 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Yoshitomo HASHIMOTO, Hiroki Yamashita | 2020-09-01 |
| 10720325 | Method of manufacturing semiconductor device, substrate processing apparatus and non-transitory computer-readable recording medium | Yushin Takasawa, Satoshi Shimamoto, Hiroki Yamashita | 2020-07-21 |
| 10134586 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Satoshi Shimamoto, Yoshiro Hirose | 2018-11-20 |
| 10032629 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Satoshi Shimamoto, Yoshiro Hirose | 2018-07-24 |
| 9773661 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Satoshi Shimamoto, Yoshiro Hirose | 2017-09-26 |