Issued Patents All Time
Showing 1–21 of 21 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12288684 | Method of processing substrate, method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Katsuyoshi Harada, Yoshitomo HASHIMOTO | 2025-04-29 |
| 12009201 | Method of processing substrate, method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Katsuyoshi Harada, Yoshitomo HASHIMOTO | 2024-06-11 |
| 11967499 | Method of processing substrate, method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Yoshitomo HASHIMOTO | 2024-04-23 |
| 11817314 | Method of processing substrate, method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Katsuyoshi Harada, Yoshitomo HASHIMOTO | 2023-11-14 |
| 11664217 | Method of manufacturing semiconductor device, substrate processing method, substrate processing apparatus, and recording medium | Katsuyoshi Harada, Yoshitomo HASHIMOTO | 2023-05-30 |
| 11515143 | Method of manufacturing semiconductor device, substrate processing apparatus, recording medium, and method of processing substrate | Yoshitomo HASHIMOTO | 2022-11-29 |
| 11164741 | Method of manufacturing semiconductor device, substrate processing method, substrate processing apparatus, and recording medium | Katsuyoshi Harada, Yoshitomo HASHIMOTO | 2021-11-02 |
| 11094532 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Atsushi Sano, Kimihiko NAKATANI, Kenji Kameda, Satoshi Shimamoto | 2021-08-17 |
| 11056337 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Katsuyoshi Harada, Yoshitomo HASHIMOTO | 2021-07-06 |
| 10910214 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Yoshitomo HASHIMOTO, Masanori NAKAYAMA, Masaya NAGATO, Hiroki Tamashita, Takafumi Nitta +1 more | 2021-02-02 |
| 10804100 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Kimihiko NAKATANI, Kenji Kameda, Atsushi Sano | 2020-10-13 |
| 10790136 | Method of manufacturing semiconductor device, substrate processing system and non-transitory computer-readable recording medium | Yoshitomo HASHIMOTO | 2020-09-29 |
| 10770287 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Katsuyoshi Harada, Yoshitomo HASHIMOTO | 2020-09-08 |
| 10755921 | Method of manufacturing semiconductor device, substrate processing apparatus and recording medium | Yoshitomo HASHIMOTO, Yoshiro Hirose | 2020-08-25 |
| 10626502 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Yoshitomo HASHIMOTO | 2020-04-21 |
| 10096463 | Method of manufacturing semiconductor device, substrate processing apparatus comprising exhaust port and multiple nozzles, and recording medium | Yoshitomo HASHIMOTO, Masaya NAGATO, Ryota Horiike, Shintaro Kogura | 2018-10-09 |
| 10074535 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Yoshiro Hirose, Yoshitomo HASHIMOTO | 2018-09-11 |
| 9934962 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Yoshitomo HASHIMOTO, Yoshiro Hirose | 2018-04-03 |
| 9741555 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Yoshitomo HASHIMOTO, Yoshiro Hirose, Katsuyoshi Harada | 2017-08-22 |
| 9583338 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Yoshitomo HASHIMOTO, Yoshiro Hirose | 2017-02-28 |
| 5133126 | Method of producing aluminum tube covered with zinc | — | 1992-07-28 |