Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12040161 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Yasutoshi TSUBOTA, Masanori NAKAYAMA, Katsunori FUNAKI, Tatsushi UEDA, Eiko TAKAMI +3 more | 2024-07-16 |
| 11289350 | Method of manufacturing semiconductor device | Yukinori Aburatani, Takashi Yahata, Tadashi Takasaki, Naofumi Ohashi, Shun MATSUI | 2022-03-29 |
| 10453720 | Method of manufacturing semiconductor device | Yukinori Aburatani, Takashi Yahata, Tadashi Takasaki, Naofumi Ohashi, Shun MATSUI | 2019-10-22 |