Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6318944 | Semiconductor fabricating apparatus, method for modifying positional displacement of a wafer in a wafer cassette within the semiconductor fabricating apparatus and method for transferring the wafer cassette | Kouji Tometsuka, Shigeo Ohba | 2001-11-20 |
| 5960159 | Heat treatment of semiconductor wafers where upper heater directly heats upper wafer in its entirety and lower heater directly heats lower wafer in its entirety | Fumihide Ikeda, Junichi Machida, Masayuki Tomita, Yasuhiro Inokuchi, Hisashi Nomura +1 more | 1999-09-28 |
| 5669644 | Wafer transfer plate | Hideki Kaihotsu, Kouji Tometsuka | 1997-09-23 |
| 4710604 | Machining apparatus with laser beam | Hiroshi Shirasu, Joji Iwamoto | 1987-12-01 |