Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6451184 | Thin film forming apparatus and process for forming thin film using same | — | 2002-09-17 |
| 6238527 | Thin film forming apparatus and method of forming thin film of compound by using the same | Nobumasa Suzuki | 2001-05-29 |
| 6200431 | Reactive sputtering apparatus and process for forming thin film using same | — | 2001-03-13 |