Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6870123 | Microwave applicator, plasma processing apparatus having same, and plasma processing method | Nobumasa Suzuki | 2005-03-22 |
| 6652709 | Plasma processing apparatus having circular waveguide, and plasma processing method | Nobumasa Suzuki | 2003-11-25 |
| 6417080 | Method of processing residue of ion implanted photoresist, and method of producing semiconductor device | — | 2002-07-09 |