Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6893970 | Plasma processing method | Tatsushi Yamamoto, Masaki Hirayama, Tadahiro Ohmi | 2005-05-17 |
| 6527908 | Plasma process apparatus | Takamitsu Tadera, Tatsushi Yamamoto, Masaki Hirayama, Tadahiro Ohmi | 2003-03-04 |