Issued Patents All Time
Showing 76–80 of 80 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6286454 | Plasma process device | Tadahiro Ohmi, Tatsushi Yamamoto, Takamitsu Tadera | 2001-09-11 |
| 6153068 | Parallel plate sputtering device with RF powered auxiliary electrodes and applied external magnetic field | Tadahiro Ohmi, Haruyuki Takano, Yusuke Hirayama | 2000-11-28 |
| 5714795 | Semiconductor device utilizing silicide reaction | Tadahiro Ohmi, Hiroshi Suzuki | 1998-02-03 |
| 5703488 | Instrument for measuring plasma excited by high-frequency | Tadahiro Ohmi | 1997-12-30 |
| 5650650 | High speed semiconductor device with a metallic substrate | Tadahiro Ohmi, Hisayuki Shimada | 1997-07-22 |