Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7672502 | Substrate positioning device, substrate positioning method and program | Keiji Osada, Gaku Ikeda, Hiroyuki Takahashi | 2010-03-02 |
| 6510365 | Carrier system positioning method | Shigeru Ishizawa, Hiroaki Saeki, Takashi Kawano, Tetsu Osawa | 2003-01-21 |