Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9449844 | Etching method, etching apparatus, and storage medium | Kenichi Hara, Isao Yamada, Takashi Hayakawa | 2016-09-20 |
| 8168946 | Charged particle separation apparatus and charged particle bombardment apparatus | Masaki Narushima, Koichi Mori, Isao Yamada | 2012-05-01 |
| 7420189 | Ultra precise polishing method and ultra precise polishing apparatus | Tomonori Imamura, Isao Yamada | 2008-09-02 |
| 7022545 | Production method of SiC monitor wafer | Isao Yamada, Jiro Matsuo, Kazutoshi Murata, Naomasa Miyatake | 2006-04-04 |
| 6750393 | Back reflector of solar cells | Kazumi Wada, Lionel C. Kimerling | 2004-06-15 |
| 6013332 | Boron doping by decaborane | Kenichi Goto, Masataka Kase, Jiro Matsuo, Isao Yamada, Daisuke Takeuchi +1 more | 2000-01-11 |