Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10669630 | Layer-forming device and injector | Nozomu Hattori, Yasunari Mori | 2020-06-02 |
| 10246776 | Layer-forming device and layer-forming method | Yasunari Mori, Nozomu Hattori | 2019-04-02 |
| 9194043 | Atomic layer deposition apparatus | Hiroyuki Tachibana, Kazutoshi Murata, Yasunari Mori | 2015-11-24 |
| 8440268 | Method and apparatus for growing plasma atomic layer | Keisuki Washio, Kazutoshi Murata, Hiroyuki Tachibana, Nozomu Hattori | 2013-05-14 |
| 7022545 | Production method of SiC monitor wafer | Isao Yamada, Jiro Matsuo, Noriaki Toyoda, Kazutoshi Murata | 2006-04-04 |