Issued Patents All Time
Showing 1–21 of 21 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9881815 | Substrate cleaning method, substrate cleaning device, and vacuum processing device | Toshio Seki, Takaaki Aoki, Kazuya Dobashi, Kensuke Inai, Misako Saito | 2018-01-30 |
| 9663862 | Method of smoothing solid surface with gas cluster ion beam and solid surface smoothing apparatus | Akinobu Sato, Akiko Suzuki, Emmanuel Bourelle, Toshio Seki | 2017-05-30 |
| 8764952 | Method for smoothing a solid surface | Akinobu Sato, Akiko Suzuki, Emmanuel Bourelle, Toshio Seki, Takaaki Aoki | 2014-07-01 |
| 8481981 | Method of smoothing solid surface with gas cluster ion beam and solid surface smoothing apparatus | Akiko Suzuki, Akinobu Sato, Emmanuel Bourelle, Toshio Seki | 2013-07-09 |
| 8461051 | Cluster jet processing method, semiconductor element, microelectromechanical element, and optical component | Kunihiko Koike, Takehiko Senoo, Yu Yoshino, Shuhei AZUMA, Toshio Seki +1 more | 2013-06-11 |
| 8268183 | Method of processing solid surface with gas cluster ion beam | Akiko Suzuki, Akinobu Sato, Emmanuel Bourelle, Toshio Seki | 2012-09-18 |
| 8178857 | Method and apparatus for flattening solid surface | Akinobu Sato, Akiko Suzuki, Emmanuel Bourelle, Toshio Seki | 2012-05-15 |
| 7960691 | Second ion mass spectrometry method and imaging method | — | 2011-06-14 |
| 7563379 | Dry etching method and photonic crystal device fabricated by use of the same | Akiko Suzuki, Akinobu Sato, Emmanuel Bourelle, Toshio Seki, Takaaki Aoki | 2009-07-21 |
| 7405394 | Gas cluster-ion irradiation apparatus | Shigeru Ono, Shinji Sasaki, Kenji Furusawa, Toshio Seki | 2008-07-29 |
| 7022545 | Production method of SiC monitor wafer | Isao Yamada, Noriaki Toyoda, Kazutoshi Murata, Naomasa Miyatake | 2006-04-04 |
| 6797334 | Method for forming gas cluster and method for forming thin film | Makoto Akizuki, Mitsuaki Harada, Satoru Ogasawara, Atsumasa Doi, Isao Yamada | 2004-09-28 |
| 6641937 | Transparent conductive film and process for producing the film | Masato Kiuchi, Kensuke Murai, Shigeharu Tamura, Norimasa Umesaki, Isao Yamada | 2003-11-04 |
| 6486068 | Method for manufacturing group III nitride compound semiconductor laser diodes | Shiro Yamasaki, Seiji Nagai, Masayoshi Koike, Isamu Akasaki, Hiroshi Amano +1 more | 2002-11-26 |
| 6416820 | Method for forming carbonaceous hard film | Isao Yamada, Teruyuki Kitagawa, Allen R. Kirkpatrick | 2002-07-09 |
| 6310148 | Stryrene resin composition and process for producing the same | Tsuyoshi Morita, Mamoru Fujihira | 2001-10-30 |
| 6013332 | Boron doping by decaborane | Kenichi Goto, Masataka Kase, Isao Yamada, Daisuke Takeuchi, Noriaki Toyoda +1 more | 2000-01-11 |
| D286382 | Watch | — | 1986-10-28 |
| D286269 | Combined wristwatch and radio | Kaname Atsumi | 1986-10-21 |
| D279555 | Watch band | — | 1985-07-09 |
| D279276 | Watch band | — | 1985-06-18 |