Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12172198 | Gas cluster processing device and gas cluster processing method | Kazuya Dobashi, Takehiko Orii, Yukimasa Saito, Kunihiko Koike, Takehiko Senoo +3 more | 2024-12-24 |
| 11267021 | Gas cluster processing device and gas cluster processing method | Kazuya Dobashi, Takehiko Orii, Yukimasa Saito, Kunihiko Koike, Takehiko Senoo +3 more | 2022-03-08 |
| 9533268 | Method and apparatus for supplying mixed gas | Kunihiko Koike, Naohisa Makihira, Takehiko Senoo, Toshihiro Aida, Tomoya Biro +2 more | 2017-01-03 |
| 9416445 | Method for treating inner surface of chlorine trifluoride supply passage in apparatus using chlorine trifluoride | Kunihiko Koike, Manabu Saeda, Toshiki Manabe | 2016-08-16 |
| 9214364 | Substrate cleaning apparatus and vacuum processing system | Kazuya Dobashi, Kensuke Inai, Akitaka Shimizu, Kenta Yasuda, Toshihiro Aida +1 more | 2015-12-15 |
| 9159622 | Dividing method for wafer | Sakae Matsuzaki, Takatoshi Masuda, Nozomi Maemoto, Takehiko Senoo, Toshihiro Aida +1 more | 2015-10-13 |
| 8461051 | Cluster jet processing method, semiconductor element, microelectromechanical element, and optical component | Kunihiko Koike, Takehiko Senoo, Shuhei AZUMA, Jiro Matsuo, Toshio Seki +1 more | 2013-06-11 |