Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9533268 | Method and apparatus for supplying mixed gas | Kunihiko Koike, Yu Yoshino, Naohisa Makihira, Takehiko Senoo, Tomoya Biro +2 more | 2017-01-03 |
| 9214364 | Substrate cleaning apparatus and vacuum processing system | Kazuya Dobashi, Kensuke Inai, Akitaka Shimizu, Kenta Yasuda, Yu Yoshino +1 more | 2015-12-15 |
| 9159622 | Dividing method for wafer | Sakae Matsuzaki, Takatoshi Masuda, Nozomi Maemoto, Yu Yoshino, Takehiko Senoo +1 more | 2015-10-13 |