Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10049899 | Substrate cleaning apparatus | Kazuya Dobashi | 2018-08-14 |
| 9960056 | Substrate cleaning method, substrate cleaning apparatus and vacuum processing system | Kazuya Dobashi, Misako Saito | 2018-05-01 |
| 9881815 | Substrate cleaning method, substrate cleaning device, and vacuum processing device | Jiro Matsuo, Toshio Seki, Takaaki Aoki, Kazuya Dobashi, Misako Saito | 2018-01-30 |
| 9837260 | Cleaning method, processing apparatus, and storage medium | Kazuya Dobashi | 2017-12-05 |
| 9214364 | Substrate cleaning apparatus and vacuum processing system | Kazuya Dobashi, Akitaka Shimizu, Kenta Yasuda, Yu Yoshino, Toshihiro Aida +1 more | 2015-12-15 |