Issued Patents All Time
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9881815 | Substrate cleaning method, substrate cleaning device, and vacuum processing device | Jiro Matsuo, Takaaki Aoki, Kazuya Dobashi, Kensuke Inai, Misako Saito | 2018-01-30 |
| 9663862 | Method of smoothing solid surface with gas cluster ion beam and solid surface smoothing apparatus | Akinobu Sato, Akiko Suzuki, Emmanuel Bourelle, Jiro Matsuo | 2017-05-30 |
| 8764952 | Method for smoothing a solid surface | Akinobu Sato, Akiko Suzuki, Emmanuel Bourelle, Jiro Matsuo, Takaaki Aoki | 2014-07-01 |
| 8481981 | Method of smoothing solid surface with gas cluster ion beam and solid surface smoothing apparatus | Akiko Suzuki, Akinobu Sato, Emmanuel Bourelle, Jiro Matsuo | 2013-07-09 |
| 8461051 | Cluster jet processing method, semiconductor element, microelectromechanical element, and optical component | Kunihiko Koike, Takehiko Senoo, Yu Yoshino, Shuhei AZUMA, Jiro Matsuo +1 more | 2013-06-11 |
| 8268183 | Method of processing solid surface with gas cluster ion beam | Akiko Suzuki, Akinobu Sato, Emmanuel Bourelle, Jiro Matsuo | 2012-09-18 |
| 8178857 | Method and apparatus for flattening solid surface | Akinobu Sato, Akiko Suzuki, Emmanuel Bourelle, Jiro Matsuo | 2012-05-15 |
| 7563379 | Dry etching method and photonic crystal device fabricated by use of the same | Akiko Suzuki, Akinobu Sato, Emmanuel Bourelle, Jiro Matsuo, Takaaki Aoki | 2009-07-21 |
| 7405394 | Gas cluster-ion irradiation apparatus | Shigeru Ono, Shinji Sasaki, Kenji Furusawa, Jiro Matsuo | 2008-07-29 |
| 4853632 | Apparatus for magnetically detecting a position of a movable magnetic body | Yoosuke Nagano, Sadao Sekizawa | 1989-08-01 |
| 4639807 | Magnetic detector having magnetoresistive elements | Sadao Sekizawa, Tadashi Takahashi | 1987-01-27 |