Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12172198 | Gas cluster processing device and gas cluster processing method | Kazuya Dobashi, Takehiko Orii, Yukimasa Saito, Kunihiko Koike, Koichi Izumi +3 more | 2024-12-24 |
| 11482455 | Cutting method of workpiece by forming reformed region and dry etching process | Toshiki Manabe, Koichi Izumi, Tadashi Shojo, Takafumi OGIWARA, Takeshi Sakamoto | 2022-10-25 |
| 11380586 | Cutting method | Toshiki Manabe, Koichi Izumi, Tadashi Shojo, Takafumi OGIWARA, Takeshi Sakamoto | 2022-07-05 |
| 11267021 | Gas cluster processing device and gas cluster processing method | Kazuya Dobashi, Takehiko Orii, Yukimasa Saito, Kunihiko Koike, Koichi Izumi +3 more | 2022-03-08 |
| 9533268 | Method and apparatus for supplying mixed gas | Kunihiko Koike, Yu Yoshino, Naohisa Makihira, Toshihiro Aida, Tomoya Biro +2 more | 2017-01-03 |
| 9214364 | Substrate cleaning apparatus and vacuum processing system | Kazuya Dobashi, Kensuke Inai, Akitaka Shimizu, Kenta Yasuda, Yu Yoshino +1 more | 2015-12-15 |
| 9159622 | Dividing method for wafer | Sakae Matsuzaki, Takatoshi Masuda, Nozomi Maemoto, Yu Yoshino, Toshihiro Aida +1 more | 2015-10-13 |
| 8461051 | Cluster jet processing method, semiconductor element, microelectromechanical element, and optical component | Kunihiko Koike, Yu Yoshino, Shuhei AZUMA, Jiro Matsuo, Toshio Seki +1 more | 2013-06-11 |
| 5759334 | Plasma processing apparatus | Kenichi Kojima, Tokihiro Ayabe, Kishichi Haga, Yukio Soejima | 1998-06-02 |