Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12172198 | Gas cluster processing device and gas cluster processing method | Kazuya Dobashi, Takehiko Orii, Yukimasa Saito, Kunihiko Koike, Takehiko Senoo +3 more | 2024-12-24 |
| 11482455 | Cutting method of workpiece by forming reformed region and dry etching process | Toshiki Manabe, Takehiko Senoo, Koichi Izumi, Takafumi OGIWARA, Takeshi Sakamoto | 2022-10-25 |
| 11380586 | Cutting method | Toshiki Manabe, Takehiko Senoo, Koichi Izumi, Takafumi OGIWARA, Takeshi Sakamoto | 2022-07-05 |
| 11267021 | Gas cluster processing device and gas cluster processing method | Kazuya Dobashi, Takehiko Orii, Yukimasa Saito, Kunihiko Koike, Takehiko Senoo +3 more | 2022-03-08 |