Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11482455 | Cutting method of workpiece by forming reformed region and dry etching process | Takehiko Senoo, Koichi Izumi, Tadashi Shojo, Takafumi OGIWARA, Takeshi Sakamoto | 2022-10-25 |
| 11380586 | Cutting method | Takehiko Senoo, Koichi Izumi, Tadashi Shojo, Takafumi OGIWARA, Takeshi Sakamoto | 2022-07-05 |
| 9416445 | Method for treating inner surface of chlorine trifluoride supply passage in apparatus using chlorine trifluoride | Yu Yoshino, Kunihiko Koike, Manabu Saeda | 2016-08-16 |
| 5554295 | Method for producing pure water | Cozy Ban, Motonori Yanagi, Takaaki Fukumoto, Hiroshi Yanome, Kazuhiko Kawada | 1996-09-10 |
| 5470461 | Apparatus for producing pure water | Cozy Ban, Motonori Yanagi, Takaaki Fukumoto, Hiroshi Yanome, Kazuhiko Kawada | 1995-11-28 |
| 5380471 | Aeration apparatus for producing ultrapure water | Cozy Ban, Motonori Yanagi, Takaaki Fukumoto, Hiroshi Yanome | 1995-01-10 |