Issued Patents All Time
Showing 1–19 of 19 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6562205 | High-temperature ultrapure water production apparatus and liquid medicine preparation apparatus equipped with the production apparatus | Kazunori Koba, Shoichi Momose, Toshinori Iwai | 2003-05-13 |
| 6431183 | Method for treating semiconductor substrates | Toko Konishi, Yasuhiro Asaoka | 2002-08-13 |
| 6410454 | Method and apparatus for removing contaminants from the surface of a semiconductor wafer | Seiji Muranaka, Akihiko OSAKI | 2002-06-25 |
| 6227212 | Semiconductor workpiece cleaning method and apparatus | Toko Konishi | 2001-05-08 |
| 6221771 | Method of forming tungsten silicide film, method of fabricating semiconductor devices and semiconductor manufactured thereby | Akinobu Teramoto | 2001-04-24 |
| 6145519 | Semiconductor workpiece cleaning method and apparatus | Toko Konishi | 2000-11-14 |
| 6131052 | Semiconductor manufacturing non-processing apparatuses with storage equipment | Kiyoshi Demizu | 2000-10-10 |
| 6032382 | Drying apparatus and method using IPA of a semiconductor wafer | Akinori Matsumoto, Takeshi Kuroda, Toko Konishi, Naoki Yokoi | 2000-03-07 |
| 6001215 | Semiconductor nitride film etching system | — | 1999-12-14 |
| 5996242 | Drying apparatus and method | Akinori Matsumoto, Takeshi Kuroda, Toko Konishi, Naoki Yokoi | 1999-12-07 |
| 5956859 | Drying apparatus for processing surface of substrate | Akinori Matsumoto, Takeshi Kuroda, Toko Konishi, Naoki Yokoi | 1999-09-28 |
| 5554295 | Method for producing pure water | Motonori Yanagi, Takaaki Fukumoto, Toshiki Manabe, Hiroshi Yanome, Kazuhiko Kawada | 1996-09-10 |
| 5470461 | Apparatus for producing pure water | Motonori Yanagi, Takaaki Fukumoto, Toshiki Manabe, Hiroshi Yanome, Kazuhiko Kawada | 1995-11-28 |
| 5468350 | Apparatus for manufacturing ultrapure water | — | 1995-11-21 |
| 5380471 | Aeration apparatus for producing ultrapure water | Motonori Yanagi, Takaaki Fukumoto, Toshiki Manabe, Hiroshi Yanome | 1995-01-10 |
| 5344615 | Wet-process apparatus | Motonori Yanagi, Takaaki Fukumoto | 1994-09-06 |
| 5336356 | Apparatus for treating the surface of a semiconductor substrate | Toshiaki Ohmori, Takaaki Fukumoto | 1994-08-09 |
| 5246586 | Apparatus and method for producing ultrapure water and method of controlling the apparatus | Takaaki Fukumoto | 1993-09-21 |
| 5216890 | Device for and method of producing hyperfine frozen particles | Itaru Kanno, Takaaki Fukumoto | 1993-06-08 |