Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6431183 | Method for treating semiconductor substrates | Cozy Ban, Yasuhiro Asaoka | 2002-08-13 |
| 6391113 | Semiconductor wafer processing apparatus and method of controlling the same | Naoki Yokoi | 2002-05-21 |
| 6227212 | Semiconductor workpiece cleaning method and apparatus | Cozy Ban | 2001-05-08 |
| 6145519 | Semiconductor workpiece cleaning method and apparatus | Cozy Ban | 2000-11-14 |
| 6032382 | Drying apparatus and method using IPA of a semiconductor wafer | Akinori Matsumoto, Takeshi Kuroda, Cozy Ban, Naoki Yokoi | 2000-03-07 |
| 5996242 | Drying apparatus and method | Akinori Matsumoto, Takeshi Kuroda, Cozy Ban, Naoki Yokoi | 1999-12-07 |
| 5956859 | Drying apparatus for processing surface of substrate | Akinori Matsumoto, Takeshi Kuroda, Cozy Ban, Naoki Yokoi | 1999-09-28 |