Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7250391 | Cleaning composition for removing resists and method of manufacturing semiconductor device | Itaru Kanno, Masahiko Higashi, Yoshiharu Hidaka, Etsuro Kishio, Tetsuo Aoyama +3 more | 2007-07-31 |
| 6837963 | Semiconductor device, method of producing a semiconductor device, and semiconductor substrate cleaning apparatus used for the production method | Hiroshi Tanaka, Naoki Yokoi, Seiji Muranaka, Toshihiko Nagai | 2005-01-04 |
| 6642142 | Substrate cleaning method and method for producing an electronic device | Toshihiko Nagai, Hiroshi Tanaka, Naoki Yokoi, Seiji Muranaka | 2003-11-04 |
| 6586145 | Method of fabricating semiconductor device and semiconductor device | Naoki Yokoi, Hiroshi Tanaka, Seiji Muranaka, Toshihiko Nagai | 2003-07-01 |
| 6531381 | Method and apparatus for cleaning semiconductor device and method of fabricating semiconductor device | Hiroshi Tanaka, Naoki Yokoi, Seiji Muranaka, Toshihiko Nagai | 2003-03-11 |
| 6431183 | Method for treating semiconductor substrates | Toko Konishi, Cozy Ban | 2002-08-13 |
| 6368415 | Method for washing semiconductor substrate and washing apparatus therefor | — | 2002-04-09 |