Issued Patents All Time
Showing 1–18 of 18 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6586345 | Method of manufacturing a semiconductor device wiring layer having an oxide layer between the polysilicon and silicide layers | — | 2003-07-01 |
| 6151914 | Method and apparatus for producing super clean air | Masashi Mizuno, Masuo Tada, Norio Yamazaki | 2000-11-28 |
| 6048409 | Washing apparatus and washing method | Itaru Kanno, Hiroshi Tanaka, Nobuaki Doi | 2000-04-11 |
| 5934566 | Washing apparatus and washing method | Itaru Kanno, Hiroshi Tanaka, Nobuaki Doi | 1999-08-10 |
| 5336356 | Apparatus for treating the surface of a semiconductor substrate | Cozy Ban, Takaaki Fukumoto | 1994-08-09 |
| 5147466 | Method of cleaning a surface by blasting the fine frozen particles against the surface | Itaru Kanno, Takaaki Fukumoto | 1992-09-15 |
| 5081068 | Method of treating surface of substrate with ice particles and hydrogen peroxide | Shinji Endo, Takaaki Fukumoto, Keisuke Namba | 1992-01-14 |
| 5074083 | Cleaning device using fine frozen particles | Itaru Kanno, Takaaki Fukumoto | 1991-12-24 |
| 5035750 | Processing method for semiconductor wafers | Masuo Tada, Takeki Hata, Takaaki Fukumoto | 1991-07-30 |
| 5025597 | Processing apparatus for semiconductor wafers | Masuo Tada, Takeki Hata, Takaaki Fukumoto | 1991-06-25 |
| 4986216 | Semiconductor manufacturing apparatus | Takaaki Fukumoto | 1991-01-22 |
| 4974375 | Ice particle forming and blasting device | Masuo Tada, Takaaki Fukumoto | 1990-12-04 |
| 4941489 | Carrier cleaning and drying apparatus | Yasuo Kamimura, Motonori Yanagi, Takaaki Fukumoto, Masaharu Hama | 1990-07-17 |
| 4932168 | Processing apparatus for semiconductor wafers | Masuo Tada, Takeki Hata, Takaaki Fukumoto | 1990-06-12 |
| 4868996 | Method and apparatus for vapor drying | Masaharu Hama, Takaaki Fukumoto | 1989-09-26 |
| 4869090 | Method of processing base plate for magnetic disc | Masuo Tada, Kazuhiko Akamatsu, Takaaki Fukumoto, Tadashi Hyono | 1989-09-26 |
| 4820650 | Introducing lattice defect with ice particles in semiconductor wafer | Akemi Nagae, Shinichi Satou, Takaaki Fukumoto | 1989-04-11 |
| 4696184 | Device for measuring the absolute value of the density of salts in atmosphere | Takaaki Fukumoto | 1987-09-29 |