Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7411274 | Silicon semiconductor substrate and its manufacturing method | Hideki Yamanaka, Tadahiro Ohmi, Akinobu Teramoto, Shigetoshi Sugawa | 2008-08-12 |
| 7315064 | Bonded wafer and method of producing bonded wafer | Kiyoshi Mitani, Isao Yokokawa, Tadahiro Ohmi, Shigetoshi Sugawa | 2008-01-01 |
| 7052974 | Bonded wafer and method of producing bonded wafer | Kiyoshi Mitani, Isao Yokokawa, Tadahiro Ohmi, Shigetoshi Sugawa | 2006-05-30 |
| 6787797 | Semiconductor wafer and device for semiconductor device manufacturing process | Tadahiro Kato, Shigeyoshi Netsu | 2004-09-07 |
| 6131052 | Semiconductor manufacturing non-processing apparatuses with storage equipment | Cozy Ban | 2000-10-10 |