Issued Patents All Time
Showing 1–25 of 32 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10886163 | Method for manufacturing bonded wafer | — | 2021-01-05 |
| 10763157 | Method for manufacturing SOI wafer | — | 2020-09-01 |
| 10347525 | Method for producing bonded SOI wafer | — | 2019-07-09 |
| 10204824 | Method for producing SOI wafer | Hiroji Aga, Norihiro Kobayashi | 2019-02-12 |
| 9865497 | Method for manufacturing bonded wafer | Hiroji Aga, Hiroshi Fujisawa | 2018-01-09 |
| 9673086 | Method of producing bonded wafer | Masahiro Kato | 2017-06-06 |
| 9337080 | Method for manufacturing SOI wafer | Hiroji Aga, Toru Ishizuka | 2016-05-10 |
| 9076840 | Method for manufacturing a bonded SOI wafer | Norihiro Kobayashi, Hiroji Aga, Toru Ishizuka, Masahiro Kato | 2015-07-07 |
| 8987109 | Method for manufacturing bonded wafer and bonded SOI wafer | Hiroji Aga, Nobuhiko Noto | 2015-03-24 |
| 8962352 | Method for calculating warpage of bonded SOI wafer and method for manufacturing bonded SOI wafer | Hiroji Aga, Yasushi Mizusawa | 2015-02-24 |
| 8956951 | Method for manufacturing SOI wafer | Masahiro Kato, Masayuki Imai | 2015-02-17 |
| 8906708 | Method for checking ion implantation condition and method for manufacturing semiconductor wafer | — | 2014-12-09 |
| 8728912 | Method for manufacturing SOI wafer | Hiroji Aga, Satoshi Oka | 2014-05-20 |
| 8361888 | Method for manufacturing SOI wafer | Nobuhiko Noto | 2013-01-29 |
| 8053334 | Method for forming silicon oxide film of SOI wafer | Nobuhiko Noto, Shin Yamaguchi | 2011-11-08 |
| 7985660 | Method for manufacturing soi wafer | Hiroshi Takeno, Nobuhiko Noto | 2011-07-26 |
| 7959731 | Method for producing semiconductor wafer | Hiroji Aga, Kiyoshi Mitani | 2011-06-14 |
| 7608548 | Method for cleaning a multilayer substrate and method for bonding substrates and method for producing a bonded wafer | Kiyoshi Mitani | 2009-10-27 |
| 7550309 | Method for producing semiconductor wafer | Nobuhiko Noto, Kiyoshi Mitani | 2009-06-23 |
| 7524744 | Method of producing SOI wafer and SOI wafer | Hiroji Aga, Kiyotaka Takano, Kiyoshi Mitani | 2009-04-28 |
| 7521265 | Method for measuring an amount of strain of a bonded strained wafer | — | 2009-04-21 |
| 7315064 | Bonded wafer and method of producing bonded wafer | Kiyoshi Mitani, Kiyoshi Demizu, Tadahiro Ohmi, Shigetoshi Sugawa | 2008-01-01 |
| 7091107 | Method for producing SOI wafer and SOI wafer | Kiyoshi Mitani | 2006-08-15 |
| 7084046 | Method of fabricating SOI wafer | Kiyoshi Mitani | 2006-08-01 |
| 7052974 | Bonded wafer and method of producing bonded wafer | Kiyoshi Mitani, Kiyoshi Demizu, Tadahiro Ohmi, Shigetoshi Sugawa | 2006-05-30 |