Issued Patents All Time
Showing 1–25 of 34 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12387126 | Method for producing semiconductor apparatus for quantum computer | Tsuyoshi Ohtsuki | 2025-08-12 |
| 12368107 | Method for producing semiconductor apparatus and semiconductor apparatus | Tsuyoshi Ohtsuki | 2025-07-22 |
| 10886129 | Method for manufacturing semiconductor device and method for evaluating semiconductor device | Tsuyoshi Ohtsuki, Tadashi Nakasugi, Katsuyoshi Suzuki | 2021-01-05 |
| 10297463 | Method for manufacturing silicon wafer | Katsuyoshi Suzuki, Koji Ebara | 2019-05-21 |
| 9748151 | Method for evaluating semiconductor substrate | Tsuyoshi Ohtsuki | 2017-08-29 |
| 9530702 | Method for measuring recombination lifetime of silicon substrate | — | 2016-12-27 |
| 8729676 | Silicon epitaxial wafer and method for manufacturing the same | Yutaka Shiga | 2014-05-20 |
| 8410573 | SOI (silicon on insulator) structure semiconductor device and method of manufacturing the same | Hiroshi Ohtsuki, Mitsutaka Katada, Nobuhiko Noto, Kazuhiko Yoshida | 2013-04-02 |
| 8338277 | Method for manufacturing SOI substrate | Tohru Ishizuka, Nobuhiko Noto | 2012-12-25 |
| 8268705 | Method for producing SOI wafer | Kazuhiko Yoshida, Masao Matsumine | 2012-09-18 |
| 7985660 | Method for manufacturing soi wafer | Isao Yokokawa, Nobuhiko Noto | 2011-07-26 |
| 7910455 | Method for producing SOI wafer | Kazuhiko Yoshida, Masao Matsumine | 2011-03-22 |
| 7902042 | Method of manufacturing SOI wafer and thus-manufactured SOI wafer | Hiroji Aga, Norihiro Kobayashi, Masayuki Imai, Tatsuo Enomoto | 2011-03-08 |
| 7799660 | Method for manufacturing SOI substrate | Tohru Ishizuka, Nobuhiko Noto | 2010-09-21 |
| 7749861 | Method for manufacturing SOI substrate and SOI substrate | Nobuhiko Noto | 2010-07-06 |
| 7311888 | Annealed wafer and method for manufacturing the same | Masahiro Sakurada, Takeshi Kobayashi | 2007-12-25 |
| 7229501 | Silicon epitaxial wafer and process for manufacturing the same | — | 2007-06-12 |
| 7189293 | Method of producing annealed wafer and annealed wafer | Norihiro Kobayashi, Masaro Tamatsuka, Takatoshi Nagoya, Wei Qu, Ken Aihara | 2007-03-13 |
| 7033962 | Methods for manufacturing silicon wafer and silicone epitaxial wafer, and silicon epitaxial wafer | — | 2006-04-25 |
| 6858094 | Silicon wafer and silicon epitaxial wafer and production methods therefor | Wei Qu, Yoshinori Hayamizu | 2005-02-22 |
| 6544332 | Method for manufacturing silicon single crystal, silicon single crystal manufactured by the method, and silicon wafer | Makoto Iida, Masanori Kimura, Yoshinori Hayamizu | 2003-04-08 |
| 6544490 | Silicon wafer and production method thereof and evaluation method for silicon wafer | Hideki Shigeno, Makoto Iida | 2003-04-08 |
| 6544899 | Process for manufacturing silicon epitaxial wafer | Norihiro Kobayashi | 2003-04-08 |
| 6478883 | Silicon single crystal wafer, epitaxial silicon wafer, and methods for producing them | Masaro Tamatsuka, Ken Aihara, Katsuhiko Miki, Yoshinori Hayamizu | 2002-11-12 |
| 6277715 | Production method for silicon epitaxial wafer | Yoshinori Hayamizu | 2001-08-21 |