Issued Patents All Time
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8492879 | Semiconductor substrate and semiconductor device | Tadahiro Ohmi, Akinobu Teramoto, Tomoyuki Suwa, Rihito Kuroda, Hideo Kudo | 2013-07-23 |
| 8187954 | Method for manufacturing silicon single crystal wafer | Hiroyasu Kikuchi | 2012-05-29 |
| 7081422 | Manufacturing process for annealed wafer and annealed wafer | Satoshi Tobe, Norihiro Kobayashi | 2006-07-25 |
| 6858094 | Silicon wafer and silicon epitaxial wafer and production methods therefor | Wei Qu, Hiroshi Takeno | 2005-02-22 |
| 6548035 | Silicon single crystal wafer for epitaxial wafer, epitaxial wafer, and methods for producing the same and evaluating the same | Akihiro Kimura, Makoto Iida, Ken Aihara, Masanori Kimura | 2003-04-15 |
| 6544656 | Production method for silicon wafer and silicon wafer | Takao Abe, Ken Aihara, Shoji Akiyama, Tetsuya Igarashi, Weifeng QU +1 more | 2003-04-08 |
| 6544332 | Method for manufacturing silicon single crystal, silicon single crystal manufactured by the method, and silicon wafer | Makoto Iida, Masanori Kimura, Hiroshi Takeno | 2003-04-08 |
| 6478883 | Silicon single crystal wafer, epitaxial silicon wafer, and methods for producing them | Masaro Tamatsuka, Ken Aihara, Katsuhiko Miki, Hiroshi Takeno | 2002-11-12 |
| 6277715 | Production method for silicon epitaxial wafer | Hiroshi Takeno | 2001-08-21 |
| 6140131 | Method and apparatus for detecting heavy metals in silicon wafer bulk with high sensitivity | Ken Sunakawa, Kiichiro Asako, Toko Yagi | 2000-10-31 |
| 5916824 | Etching method of silicon wafer surface and etching apparatus of the same | Masanori Mayuzumi, Katsuaki Yoshizawa | 1999-06-29 |