Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8728870 | Thin film silicon wafer and method for manufacturing the same | Takao Takenaka | 2014-05-20 |
| 8043871 | Method for forming oxide film on silicon wafer | Tsuyoshi Ohtsuki, Yasushi Mizusawa | 2011-10-25 |
| 7713851 | Method of manufacturing silicon epitaxial wafer | Fumitaka Kume, Tomosuke Yoshida, Ken Aihara, Ryoji Hoshi, Naohisa Toda +1 more | 2010-05-11 |
| 7081422 | Manufacturing process for annealed wafer and annealed wafer | Yoshinori Hayamizu, Norihiro Kobayashi | 2006-07-25 |
| 7078357 | Method for manufacturing silicon wafer and silicon wafer | Ken Aihara | 2006-07-18 |
| 7071079 | Epitaxial wafer and a method for producing it | — | 2006-07-04 |