Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10460983 | Method for manufacturing a bonded SOI wafer | Taishi WAKABAYASHI, Kenji Meguro, Masatake Nakano, Shinichiro Yagi | 2019-10-29 |
| 8697547 | Method for manufacturing silicon epitaxial wafer | — | 2014-04-15 |
| 7713851 | Method of manufacturing silicon epitaxial wafer | Fumitaka Kume, Ken Aihara, Ryoji Hoshi, Satoshi Tobe, Naohisa Toda +1 more | 2010-05-11 |
| 7270708 | Susceptor, vapor phase growth apparatus, epitaxial wafer manufacturing apparatus, epitaxial wafer manufacturing method, and epitaxial wafer | Takeshi Arai, Kenji Akiyama, Hiroki Ose | 2007-09-18 |
| 6599603 | Silicon wafer | Masahiro Kato, Masaro Tamatsuka, Osamu Imai, Akihiro Kimura | 2003-07-29 |
| 6162708 | Method for producing an epitaxial silicon single crystal wafer and the epitaxial silicon single crystal wafer | Masaro Tamatsuka, Ken Aihara | 2000-12-19 |
| 5841532 | Method for evaluating oxygen concentrating in semiconductor silicon single crystal | Yutaka Kitagawara | 1998-11-24 |