Issued Patents All Time
Showing 1–25 of 37 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12084788 | Method for producing a silicon single crystal doped with nitrogen and having a controlled amount of carbon impurities | Kosei Sugawara, Tomohiko Ohta | 2024-09-10 |
| 11053606 | Method of producing silicon single crystal, and silicon single crystal wafer | Kosei Sugawara | 2021-07-06 |
| 10400353 | Method for controlling resistivity and N-type silicon single crystal | Hiroyuki Kamada, Kiyotaka Takano | 2019-09-03 |
| 10100430 | Method for growing silicon single crystal | Masanori Takazawa | 2018-10-16 |
| 10066322 | Method for heat treatment of silicon single crystal wafer | Hiroyuki Kamada | 2018-09-04 |
| 9938640 | Method for heat treatment of silicon single crystal wafer | Hiroyuki Kamada | 2018-04-10 |
| 9938634 | Method of producing silicon single crystal | Masahiro Sakurada, Junya Tokue, Izumi Fusegawa | 2018-04-10 |
| 9850595 | Method for heat treatment of silicon single crystal wafer | Hiroyuki Kamada | 2017-12-26 |
| 9783912 | Silicon single crystal growing apparatus and method for growing silicon single crystal | Kosei Sugawara | 2017-10-10 |
| 9773710 | Method for evaluating concentration of defect in silicon single crystal substrate | Hiroyuki Kamada | 2017-09-26 |
| 9650725 | Method for manufacturing a defect-controlled low-oxygen concentration silicon single crystal wafer | Hiroyuki Kamada, Kosei Sugawara | 2017-05-16 |
| 9425345 | Epitaxial wafer and manufacturing method thereof | Masahiro Sakurada, Izumi Fusegawa | 2016-08-23 |
| 9337013 | Silicon wafer and method for producing the same | Izumi Fusegawa, Susumu Sonokawa, Hisayuki Saito | 2016-05-10 |
| 9260796 | Method for measuring distance between lower end surface of heat insulating member and surface of raw material melt and method for controlling thereof | Masahiko Urano, Susumu Sonokawa | 2016-02-16 |
| 9217208 | Apparatus for producing single crystal | Kiyotaka Takano | 2015-12-22 |
| 9111883 | Method for evaluating silicon single crystal and method for manufacturing silicon single crystal | Hiroyuki Kamada, Suguru Matsumoto | 2015-08-18 |
| 8885915 | Method for measuring and controlling distance between lower end surface of heat shielding member and surface of raw material melt and method for manufacturing silicon single crystal | Kosei Sugawara, Masahiko Urano | 2014-11-11 |
| 8764900 | Apparatus and method for producing single crystals | Kiyotaka Takano, Masahiko Urano | 2014-07-01 |
| 8211228 | Method for producing single crystal and a method for producing annealed wafer | Takahiro Yanagimachi | 2012-07-03 |
| 8083852 | Single crystal growth method and single crystal pulling apparatus | Kosei Sugawara, Masanori Takazawa, Yuuichi Miyahara, Atsushi Iwasaki | 2011-12-27 |
| 7909930 | Method for producing a silicon single crystal and a silicon single crystal | Naoki Nagai, Izumi Fusegawa | 2011-03-22 |
| 7713851 | Method of manufacturing silicon epitaxial wafer | Fumitaka Kume, Tomosuke Yoshida, Ken Aihara, Satoshi Tobe, Naohisa Toda +1 more | 2010-05-11 |
| 7594966 | Method for producing a single crystal | Susumu Sonokawa | 2009-09-29 |
| 7396405 | Single crystal, single crystal wafer, epitaxial wafer, and method of growing single crystal | Susumu Sonokawa | 2008-07-08 |
| 7204881 | Silicon wafer for epitaxial growth, an epitaxial wafer, and a method for producing it | Susumu Sonokawa | 2007-04-17 |