Issued Patents All Time
Showing 1–25 of 30 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11486833 | Method for evaluating edge shape of silicon wafer, apparatus for evaluating thereof, silicon wafer, method for selecting and method for manufacturing thereof | Makoto Kobayashi, Takeshi Kobayashi, Koichi Kanaya | 2022-11-01 |
| 10355092 | Silicon epitaxial wafer and method of producing silicon epitaxial wafer | — | 2019-07-16 |
| 9938634 | Method of producing silicon single crystal | Junya Tokue, Ryoji Hoshi, Izumi Fusegawa | 2018-04-10 |
| 9425345 | Epitaxial wafer and manufacturing method thereof | Ryoji Hoshi, Izumi Fusegawa | 2016-08-23 |
| 8147611 | Method of manufacturing single crystal | Izumi Fusegawa | 2012-04-03 |
| 7518187 | Soi wafer and a method for producing the same | — | 2009-04-14 |
| 7407866 | Soi wafer and a method for producing the same | Nobuaki Mitamura, Izumi Fusegawa | 2008-08-05 |
| 7384477 | Method for producing a single crystal and a single crystal | Makoto Iida, Nobuaki Mitamura, Atsushi Ozaki | 2008-06-10 |
| 7323048 | Method for producing a single crystal and a single crystal | Makoto Iida, Nobuaki Mitamura, Atsushi Ozaki | 2008-01-29 |
| 7311888 | Annealed wafer and method for manufacturing the same | Hiroshi Takeno, Takeshi Kobayashi | 2007-12-25 |
| 7294196 | Silicon single crystal wafer, an epitaxial wafer and a method for producing a silicon single crystal | Nobuaki Mitamura, Izumi Fusegawa, Tomohiko Ohta | 2007-11-13 |
| 7258744 | Graphite heater for producing single crystal, apparatus for producing single crystal, and method for producing single crystal | Izumi Fusegawa, Satoshi Soeta, Makoto Iida | 2007-08-21 |
| 7226507 | Method for producing single crystal and single crystal | Nobuaki Mitamura, Tomohiko Ohta, Izumi Fusegawa, Atsushi Ozaki | 2007-06-05 |
| 7214268 | Method of producing P-doped silicon single crystal and P-doped N-type silicon single crystal wafer | Izumi Fusegawa | 2007-05-08 |
| 7129123 | SOI wafer and a method for producing an SOI wafer | Nobuaki Mitamura, Izumi Fusegawa, Tomohiko Ohta | 2006-10-31 |
| 6913646 | Silicon single crystal wafer and method for producing silicon single crystal | Takeshi Kobayashi, Tatsuo Mori, Izumi Fusegawa, Tomohiko Ohta | 2005-07-05 |
| 6893499 | Silicon single crystal wafer and method for manufacturing the same | Izumi Fusegawa, Koji Kitagawa, Ryoji Hoshi, Tomohiko Ohta | 2005-05-17 |
| 6565822 | Epitaxial silicon wafer, method for producing the same and subtrate for epitaxial silicon wafer | Ryoji Hoshi, Susumu Sonokawa, Tomohiko Ohta, Izumi Fusegawa | 2003-05-20 |
| 6482260 | Silicon single crystal wafer and a method for producing it | Hideki Yamanaka, Tomohiko Ohta | 2002-11-19 |
| 6190452 | Silicon single crystal wafer and method for producing it | Hideki Yamanaka, Tomohiko Ohta | 2001-02-20 |
| 6174364 | Method for producing silicon monocrystal and silicon monocrystal wafer | Hideki Yamanaka, Shinichi Horie | 2001-01-16 |
| 6071337 | Apparatus and method for producing crystals by the czochralski method and crystals produced by this method | Yuichi Miyahara, Tomohiko Ohta | 2000-06-06 |
| 5948163 | Apparatus for manufacturing crystals according to the Czochralski method, and crystals manufactured by the manufacturing method | Tomohiko Ohta | 1999-09-07 |
| 5938842 | Method for producing a single crystal using czochralski technique | Tomohiko Oota, Kiyotaka Takano, Masanori Kimura | 1999-08-17 |
| 5817171 | Apparatus and method for producing single crystal using Czochralski technique | Tomohiko Oota, Kiyotaka Takano, Masanori Kimura | 1998-10-06 |