Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10983158 | Method for evaluating crystal defects | — | 2021-04-20 |
| 10345102 | Method for evaluating warpage of wafer and method for sorting wafer | — | 2019-07-09 |
| 10234281 | Method for evaluating haze | — | 2019-03-19 |
| 9337013 | Silicon wafer and method for producing the same | Izumi Fusegawa, Ryoji Hoshi, Susumu Sonokawa | 2016-05-10 |
| 8111081 | Method for evaluating silicon wafer | — | 2012-02-07 |
| 7718446 | Evaluation method for crystal defect in silicon single crystal wafer | Yutaka Kitagawara | 2010-05-18 |