Issued Patents All Time
Showing 1–14 of 14 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11440804 | Process for producing polycrystalline silicon mass | Shigeyoshi Netsu, Junichi Okada | 2022-09-13 |
| 10720366 | Method for manufacturing resistivity standard sample and method for measuring resistivity of epitaxial wafer | — | 2020-07-21 |
| 10366882 | System for producing polycrystalline silicon, apparatus for producing polycrystalline silicon, and process for producing polycrystalline silicon | Shigeyoshi Netsu, Kyoji Oguro, Takaaki Shimizu, Yasushi Kurosawa | 2019-07-30 |
| 10073126 | C-V characteristic measurement system and method for measuring C-V characteristics | Hisatoshi Kashino | 2018-09-11 |
| 9562289 | Carbon electrode with slidable contact surfaces and apparatus for manufacturing polycrystalline silicon rod | Shigeyoshi Netsu, Shinichi Kurotani, Kyoji Oguro, Masaru Hirahara | 2017-02-07 |
| 9287111 | Ozone gas generation processing apparatus, method of forming silicon oxide film, and method for evaluating silicon single crystal wafer | — | 2016-03-15 |
| 9193596 | Reactor for producing polycrystalline silicon, system for producing polycrystalline silicon, and process for producing polycrystalline silicon | Shigeyoshi Netsu, Kyoji Oguro, Takaaki Shimizu, Yasushi Kurosawa | 2015-11-24 |
| 9017482 | System for producing polycrystalline silicon, apparatus for producing polycrystalline silicon, and process for producing polycrystalline silicon | Shigeyoshi Netsu, Kyoji Oguro, Takaaki Shimizu, Yasushi Kurosawa | 2015-04-28 |
| 9006002 | Polycrystalline silicon rod and method for manufacturing polycrystalline silicon rod | Shigeyoshi Netsu, Junichi Okada | 2015-04-14 |
| 8963070 | Method for measuring carbon concentration in polycrystalline silicon | Junichi Okada, Kouichi Kobayashi | 2015-02-24 |
| 8793853 | Core wire holder for producing polycrystalline silicon and method for producing polycrystalline silicon | Shigeyoshi Netsu, Shinichi Kurotani, Kyoji Oguro | 2014-08-05 |
| 7867803 | Method of fabricating light emitting device and compound semiconductor wafer and light emitting device | Masayuki Shinohara | 2011-01-11 |
| 7811464 | Preferential etching method and silicon single crystal substrate | — | 2010-10-12 |
| 7713851 | Method of manufacturing silicon epitaxial wafer | Tomosuke Yoshida, Ken Aihara, Ryoji Hoshi, Satoshi Tobe, Naohisa Toda +1 more | 2010-05-11 |