Issued Patents All Time
Showing 26–37 of 37 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7201801 | Heater for manufacturing a crystal | Susumu Sonokawa, Wataru Sato, Tomohiko Ohta | 2007-04-10 |
| 6893499 | Silicon single crystal wafer and method for manufacturing the same | Izumi Fusegawa, Koji Kitagawa, Masahiro Sakurada, Tomohiko Ohta | 2005-05-17 |
| 6764548 | Apparatus and method for producing silicon semiconductor single crystal | Takahiro Yanagimachi, Izumi Fusegawa, Tomohiko Ohta, Yuuichi Miyahara, Tetsuya Igarashi | 2004-07-20 |
| 6632280 | Apparatus for growing single crystal, method for producing single crystal utilizing the apparatus and single crystal | Koji Kitagawa, Izumi Fusegawa, Tomohiko Ohta | 2003-10-14 |
| 6632411 | Silicon wafer and method for producing silicon single crystal | Izumi Fusegawa, Tomohiko Ohta, Shigemaru Maeda | 2003-10-14 |
| 6592662 | Method for preparing silicon single crystal and silicon single crystal | Izumi Fusegawa, Kouichi Inokoshi, Tomohiko Ohta | 2003-07-15 |
| 6565822 | Epitaxial silicon wafer, method for producing the same and subtrate for epitaxial silicon wafer | Susumu Sonokawa, Masahiro Sakurada, Tomohiko Ohta, Izumi Fusegawa | 2003-05-20 |
| 6156119 | Silicon single crystal and method for producing the same | Kouichi Inokoshi, Tomohiko Ohta | 2000-12-05 |
| 6117231 | Method of manufacturing semiconductor silicon single crystal wafer | Izumi Fusegawa, Toshirou Hayashi, Tomohiko Ohta | 2000-09-12 |
| 5612539 | Method of evaluating lifetime related quality of semiconductor surface | Yutaka Kitagawara, Takao Takenaka | 1997-03-18 |
| 5598452 | Method of evaluating a silicon single crystal | Hiroshi Takeno, Satoshi Ushio, Takao Takenaka | 1997-01-28 |
| 5302832 | Method for evaluation of spatial distribution of deep level concentration in semiconductor crystal | Yutaka Kitagawara, Takao Takenaka | 1994-04-12 |