Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7270708 | Susceptor, vapor phase growth apparatus, epitaxial wafer manufacturing apparatus, epitaxial wafer manufacturing method, and epitaxial wafer | Tomosuke Yoshida, Takeshi Arai, Kenji Akiyama | 2007-09-18 |
| 7060944 | Heat treatment device and heat treatment method | — | 2006-06-13 |
| 6814811 | Semiconductor wafer and vapor phase growth apparatus | — | 2004-11-09 |
| 6746941 | Semiconductor wafer and production method therefor | — | 2004-06-08 |
| 6589336 | Production method for silicon epitaxial wafer and silicon epitaxial wafer | Koji Ebara, Yasuo Kasahara | 2003-07-08 |
| 6475627 | Semiconductor wafer and vapor growth apparatus | — | 2002-11-05 |
| 6454854 | Semiconductor wafer and production method therefor | — | 2002-09-24 |
| 5882401 | Method for manufacturing silicon single crystal substrate for use of epitaxial layer growth | Tamotsu Maruyama | 1999-03-16 |