Issued Patents All Time
Showing 1–19 of 19 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12387126 | Method for producing semiconductor apparatus for quantum computer | Hiroshi Takeno | 2025-08-12 |
| 12368107 | Method for producing semiconductor apparatus and semiconductor apparatus | Hiroshi Takeno | 2025-07-22 |
| 12308225 | Method for forming thermal oxide film on semiconductor substrate | Tatsuo Abe | 2025-05-20 |
| 12183641 | Method for evaluating semiconductor substrate | — | 2024-12-31 |
| 11824070 | Silicon single crystal substrate and silicon epitaxial wafer for solid-state image sensor and solid-state image sensor | Takao Abe | 2023-11-21 |
| 11248306 | Anodic-oxidation equipment, anodic-oxidation method, and method for producing cathode of anodic-oxidation equipment | Masaro Tamatsuka | 2022-02-15 |
| 10886129 | Method for manufacturing semiconductor device and method for evaluating semiconductor device | Tadashi Nakasugi, Hiroshi Takeno, Katsuyoshi Suzuki | 2021-01-05 |
| 9935021 | Method for evaluating a semiconductor wafer | — | 2018-04-03 |
| 9780006 | Method for evaluating SOI substrate | — | 2017-10-03 |
| 9748151 | Method for evaluating semiconductor substrate | Hiroshi Takeno | 2017-08-29 |
| 9696368 | Semiconductor substrate evaluating method, semiconductor substrate for evaluation, and semiconductor device | — | 2017-07-04 |
| 8900971 | Bonded substrate and manufacturing method thereof | Wei Qu, Fumio Tahara, Yuuki Ooi, Kiyoshi Mitani | 2014-12-02 |
| 8877609 | Method for manufacturing bonded substrate having an insulator layer in part of bonded substrate | Wei Qu, Fumio Tahara, Yuuki Ooi, Kiyoshi Mitani | 2014-11-04 |
| 8575722 | Semiconductor substrate having multilayer film and method to reuse the substrate by delaminating a porous layer | Kiyoshi Mitani, Toru Takahashi, Wei Qu | 2013-11-05 |
| 8551246 | Method for evaluating oxide dielectric breakdown voltage of a silicon single crystal wafer | Fumio Tahara, Takatoshi Nagoya, Kiyoshi Mitani | 2013-10-08 |
| 8043871 | Method for forming oxide film on silicon wafer | Satoshi Tobe, Yasushi Mizusawa | 2011-10-25 |
| 7633305 | Method for evaluating semiconductor wafer and apparatus for evaluating semiconductor wafer | Hideki Sato | 2009-12-15 |
| 7525327 | Apparatus for evaluating semiconductor wafer | Hideki Sato | 2009-04-28 |
| 6541117 | Silicon epitaxial wafer and a method for producing it | — | 2003-04-01 |