FT

Fumio Tahara

SC Shin-Etsu Handotai Co.: 7 patents #106 of 679Top 20%
Overall (All Time): #731,332 of 4,157,543Top 20%
7
Patents All Time

Issued Patents All Time

Showing 1–7 of 7 patents

Patent #TitleCo-InventorsDate
9708726 Silicon wafer heat treatment method Wei Qu 2017-07-18
9606030 Method for detecting crystal defects Wei Qu, Yuuki Ooi 2017-03-28
8916953 Method for manufacturing silicon single crystal wafer and annealed wafer Wei Qu, Yuuki Ooi, Shu Sugisawa 2014-12-23
8900971 Bonded substrate and manufacturing method thereof Tsuyoshi Ohtsuki, Wei Qu, Yuuki Ooi, Kiyoshi Mitani 2014-12-02
8877609 Method for manufacturing bonded substrate having an insulator layer in part of bonded substrate Tsuyoshi Ohtsuki, Wei Qu, Yuuki Ooi, Kiyoshi Mitani 2014-11-04
8551246 Method for evaluating oxide dielectric breakdown voltage of a silicon single crystal wafer Tsuyoshi Ohtsuki, Takatoshi Nagoya, Kiyoshi Mitani 2013-10-08
7713851 Method of manufacturing silicon epitaxial wafer Fumitaka Kume, Tomosuke Yoshida, Ken Aihara, Ryoji Hoshi, Satoshi Tobe +1 more 2010-05-11