Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11824521 | Vibration substrate having a pair of holding portions and a beam portion connecting the holding portions, vibrator, and vibrator unit | Hayato Sasaki, Toru Kizu, Hiroshi Kumano, Hiroaki Kaida | 2023-11-21 |
| 9606030 | Method for detecting crystal defects | Wei Qu, Fumio Tahara | 2017-03-28 |
| 8916953 | Method for manufacturing silicon single crystal wafer and annealed wafer | Wei Qu, Fumio Tahara, Shu Sugisawa | 2014-12-23 |
| 8904840 | Method for manufacturing coating rod | Atsushi Ooshima, Nobuyuki Sone | 2014-12-09 |
| 8900971 | Bonded substrate and manufacturing method thereof | Tsuyoshi Ohtsuki, Wei Qu, Fumio Tahara, Kiyoshi Mitani | 2014-12-02 |
| 8877609 | Method for manufacturing bonded substrate having an insulator layer in part of bonded substrate | Tsuyoshi Ohtsuki, Wei Qu, Fumio Tahara, Kiyoshi Mitani | 2014-11-04 |