Issued Patents All Time
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6254933 | Method of chemical vapor deposition | Hitoshi Habuka, Naoto Tate, Masatake Katayama | 2001-07-03 |
| 6048793 | Method and apparatus for thin film growth | Hitoshi Habuka, Naoto Tate, Masatake Katayama | 2000-04-11 |
| 5993557 | Apparatus for growing single-crystalline semiconductor film | Munenori Tomita, Hitoshi Habuka | 1999-11-30 |
| 5938840 | Method for vapor phase growth | Hitoshi Habuka, Naoto Tate, Masatake Katayama | 1999-08-17 |
| 5916824 | Etching method of silicon wafer surface and etching apparatus of the same | Katsuaki Yoshizawa, Yoshinori Hayamizu | 1999-06-29 |
| 5856652 | Radiant heating apparatus and method | — | 1999-01-05 |
| 5849078 | Method for growing single-crystalline semiconductor film and apparatus used therefor | Munenori Tomita, Hitoshi Habuka | 1998-12-15 |
| 5755878 | Method for vapor phase growth | Hitoshi Habuka, Naoto Tate, Masatake Katayama | 1998-05-26 |
| 5749974 | Method of chemical vapor deposition and reactor therefor | Hitoshi Habuka, Naoto Tate, Masatake Katayama | 1998-05-12 |
| 5743956 | Method of producing single crystal thin film | Hitoshi Habuka | 1998-04-28 |
| 5718762 | Method for vapor-phase growth | Hitoshi Habuka, Naoto Tate, Hitoshi Tsunoda, Masatake Katayama | 1998-02-17 |