Issued Patents All Time
Showing 1–25 of 27 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9777375 | Converging mirror furnace | Shinichi Ikeda, Shiro Hara, Takanori Mikahara, Sommawan Khumpuang | 2017-10-03 |
| 6569239 | Silicon epitaxial wafer and production method therefor | Takeshi Arai, Tadaaki Honma | 2003-05-27 |
| 6309458 | Method for fabricating silicon thin film | Shoji Akiyama, Toru Otsuka | 2001-10-30 |
| 6254933 | Method of chemical vapor deposition | Masanori Mayuzumi, Naoto Tate, Masatake Katayama | 2001-07-03 |
| 6245647 | Method for fabrication of thin film | Shoji Akiyama, Toru Otsuka | 2001-06-12 |
| 6238478 | Silicon single crystal and process for producing single-crystal silicon thin film | — | 2001-05-29 |
| 6235645 | Process for cleaning silicon semiconductor substrates | Toru Otsuka | 2001-05-22 |
| 6194691 | Heating furnace and manufacturing method therefor | Toru Otsuka | 2001-02-27 |
| 6124209 | Method for treating a surface of a silicon single crystal and a method for manufacturing a silicon single crystal thin film | Toru Otsuka | 2000-09-26 |
| 6072164 | Heat-treating method and radiant heating device | Naoto Tate, Tomoyuki Sakai, Naohisa Toda | 2000-06-06 |
| 6048793 | Method and apparatus for thin film growth | Masanori Mayuzumi, Naoto Tate, Masatake Katayama | 2000-04-11 |
| 6008128 | Method for smoothing surface of silicon single crystal substrate | Toru Otsuka, Masatake Katayama | 1999-12-28 |
| 5993557 | Apparatus for growing single-crystalline semiconductor film | Munenori Tomita, Masanori Mayuzumi | 1999-11-30 |
| 5938840 | Method for vapor phase growth | Masanori Mayuzumi, Naoto Tate, Masatake Katayama | 1999-08-17 |
| 5913974 | Heat treating method of a semiconductor single crystal substrate | — | 1999-06-22 |
| 5885346 | Silicon semiconductor crystal and a method for manufacturing it | Toru Otsuka | 1999-03-23 |
| 5868833 | Method of producing silicon single crystal thin film | — | 1999-02-09 |
| 5858881 | Method of producing thin film | — | 1999-01-12 |
| 5849078 | Method for growing single-crystalline semiconductor film and apparatus used therefor | Munenori Tomita, Masanori Mayuzumi | 1998-12-15 |
| 5846321 | Method of producing single crystal thin film | Masanori Mayusumi | 1998-12-08 |
| 5755878 | Method for vapor phase growth | Masanori Mayuzumi, Naoto Tate, Masatake Katayama | 1998-05-26 |
| 5749974 | Method of chemical vapor deposition and reactor therefor | Masanori Mayuzumi, Naoto Tate, Masatake Katayama | 1998-05-12 |
| 5743956 | Method of producing single crystal thin film | Masanori Mayuzumi | 1998-04-28 |
| 5718762 | Method for vapor-phase growth | Naoto Tate, Masanori Mayuzumi, Hitoshi Tsunoda, Masatake Katayama | 1998-02-17 |
| 5685905 | Method of manufacturing a single crystal thin film | Takatoshi Nagoya, Hisashi Kashino | 1997-11-11 |