Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7049154 | Vapor phase growth method by controlling the heat output in the gas introduction region | — | 2006-05-23 |
| 6890383 | Method of manufacturing semiconductor wafer and susceptor used therefor | — | 2005-05-10 |
| 6217651 | Method for correction of thin film growth temperature | Koichi Kanaya | 2001-04-17 |
| 5685905 | Method of manufacturing a single crystal thin film | Takatoshi Nagoya, Hitoshi Habuka | 1997-11-11 |